[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Fast and robust cantilever switch with suppressed bouncing for ic applications
Kim, Min-Wu, Song, Yong-Ha, Yoon, Jun-BoYear:
2011
Language:
english
DOI:
10.1109/MEMSYS.2011.5734654
File:
PDF, 891 KB
english, 2011