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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - A large-deflection high-force micro electromagnetic hydraulic Latex membrane actuator for fluid manipulation in micro channels
Park, Jung Woo, Yang, Jung-Hoon, Kim, HanseupYear:
2011
Language:
english
DOI:
10.1109/MEMSYS.2011.5734649
File:
PDF, 2.47 MB
english, 2011