[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Controlled batch fabrication of crystalline silicon nanobeam-based resonant structures
Rahafrooz, Amir, Pourkamali, SiavashYear:
2011
Language:
english
DOI:
10.1109/MEMSYS.2011.5734683
File:
PDF, 1.61 MB
english, 2011