Kinetic Modeling of the Hydrochlorination of Silicon with SiCl4 and H2
Frank Becker, Sigurd Buchholz, Leslaw MleczkoVolume:
73
Year:
2001
Language:
english
Pages:
1
DOI:
10.1002/1522-2640(200106)73:63.0.co;2-x
File:
PDF, 44 KB
english, 2001