Thermal conductivity of titanium aluminum silicon nitride...

Thin Solid Films 2013 / 06 Vol. 537

Thermal conductivity of titanium aluminum silicon nitride coatings deposited by lateral rotating cathode arc

Samani, M.K., Ding, X.Z., Amini, S., Khosravian, N., Cheong, J.Y., Chen, G., Tay, B.K.
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Volume:
537
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.04.029
Date:
June, 2013
File:
PDF, 623 KB
english, 2013
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