[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Electro-thermally tunable silicon photonic crystal lens
Cui, Yonghao, Liu, Ke, Foland, Steven, Choi, Kyung-Hak, Tinker, Mark, MacFarlane, Duncan, Lee, Jeong-BongYear:
2010
Language:
english
DOI:
10.1109/MEMSYS.2010.5442535
File:
PDF, 1.43 MB
english, 2010