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[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - High tuning range and low pull-in voltage MEMS tunable capacitors filled with liquid crystal materials
Lin, Chia-Wei, Chen, Yi-Jie, Lee, Chien-Wen, Shih, Wen-Pin, Chang, Pei-ZenYear:
2010
Language:
english
DOI:
10.1109/MEMSYS.2010.5442526
File:
PDF, 966 KB
english, 2010