[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - AFM characterization of adhesion force in micro-relays
Lee, Donovan, Pott, Vincent, Kam, Hei, Nathanael, Rhesa, Liu, Tsu-Jae KingYear:
2010
Language:
english
DOI:
10.1109/MEMSYS.2010.5442522
File:
PDF, 1.52 MB
english, 2010