TiO2 anatase films obtained by direct liquid injection...

Applied Surface Science 2014 / 1 Vol. 288

TiO2 anatase films obtained by direct liquid injection atomic layer deposition at low temperature

Avril, L., Reymond-Laruinaz, S., Decams, J.M., Bruyère, S., Potin, V., de Lucas, M.C. Marco, Imhoff, L.
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Volume:
288
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2013.10.007
Date:
January, 2014
File:
PDF, 697 KB
english, 2014
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