Influence of Colloidal Abrasive Size on Material Removal...

Tribology Transactions 2002 / 01 Vol. 45; Iss. 2

Influence of Colloidal Abrasive Size on Material Removal Rate and Surface Finish in SiO 2 Chemical Mechanical Polishing

Zhou, Chunhong, Shan, Lei, Hight, J. Robert, Danyluk, Steven, Ng, S. H., Paszkowski, Andrew J.
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Volume:
45
Language:
english
Journal:
Tribology Transactions
DOI:
10.1080/10402000208982545
Date:
January, 2002
File:
PDF, 636 KB
english, 2002
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