[IEEE 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010) - Wanchai, Hong Kong (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - High yield dense array of very-high-aspect-ratio micro metal posts by photo-electrochemical etching of silicon and electroplating with vacuum degassing

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