[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Selective laser annealing for improved SiGe MEMS structural layers at 210°C
El-Rifai, Joumana, Witvrouw, Ann, Aziz, Ahmed Abdel, Puers, Robert, Van Hoof, Chris, Sedky, SherifYear:
2010
Language:
english
DOI:
10.1109/MEMSYS.2010.5442501
File:
PDF, 2.82 MB
english, 2010