Design issues in a decoupled XY stage: Static and dynamics...

Sensors and Actuators A: Physical 2013 / 5 Vol. 194

Design issues in a decoupled XY stage: Static and dynamics modeling, hysteresis compensation, and tracking control

Qin, Yanding, Shirinzadeh, Bijan, Tian, Yanling, Zhang, Dawei
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Volume:
194
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2013.02.003
Date:
May, 2013
File:
PDF, 1.60 MB
english, 2013
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