Quantitative electron microprobe analysis of thin films on substrates with a new Monte Carlo simulation
Murata, Kenji, Kotera, Masatoshi, Nagami, KoichiVolume:
54
Year:
1983
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.332127
File:
PDF, 536 KB
english, 1983