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[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Multilayer microcantilever heater-thermometer with improved thermal resistance for nanotopography measurements
Dai, Zhenting, Corbin, Elise A., King, William P.Year:
2010
Language:
english
DOI:
10.1109/MEMSYS.2010.5442467
File:
PDF, 1.28 MB
english, 2010