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[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Polycarbosilane-derived silicon carbide MEMS component fabricated by slip casting with SU8 micro mold
Ishikawa, T., Namazu, T., Yoshiki, K., Inoue, S., Hasegawa, Y.Year:
2010
Language:
english
DOI:
10.1109/MEMSYS.2010.5442476
File:
PDF, 2.92 MB
english, 2010