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[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Parylene stiction
Yu, Feiqiao, Lin, Jeffrey Chun-Hui, Chen, Po-Jui, Tai, Yu-ChongYear:
2010
Language:
english
DOI:
10.1109/MEMSYS.2010.5442478
File:
PDF, 603 KB
english, 2010