Fermi-Level Pinning Induced Thermal Instability in the Effective Work Function of TaN in<tex>$hbox TaN/SiO_2$</tex>Gate Stack
Ren, C., Yu, H.Y., Kang, J.F., Hou, Y.T., Li, M.-F., Wang, W.D., Chan, D.S.H., Kwong, D.-L.Volume:
25
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2004.824251
Date:
March, 2004
File:
PDF, 146 KB
english, 2004