A ZnO microcantilever for high-frequency nanopositioning:...

Sensors and Actuators A: Physical 2013 / 5 Vol. 194

A ZnO microcantilever for high-frequency nanopositioning: Modeling, fabrication and characterization

Yuan, Yanhui, Du, Hejun, Wang, Peihong, Chow, Kun Shyong, Zhang, Mingsheng, Yu, Shengkai, Liu, Bo
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Volume:
194
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2013.02.002
Date:
May, 2013
File:
PDF, 864 KB
english, 2013
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