Characterization of ZrN Thin Films Deposited by Reactive DC...

Advanced Materials Research 2013 / 9 Vol. 770

Characterization of ZrN Thin Films Deposited by Reactive DC Magnetron Sputtering

Choeysuppaket, Attapol, Witit-Anun, Nirun, Chaiyakun, Surasing
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Volume:
770
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.770.350
Date:
September, 2013
File:
PDF, 1.03 MB
english, 2013
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