Role of hydrogen diffusion on the growth of polymorphous and microcrystalline silicon thin films
Fontcuberta i Morral, A., Roca i Cabarrocas, P.Volume:
35
Language:
english
Journal:
The European Physical Journal Applied Physics
DOI:
10.1051/epjap:2006094
Date:
September, 2006
File:
PDF, 318 KB
english, 2006