[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Measurement of elastic tension of Parylene films deposited on liquid
Binh-khiem, Nguyen, Matsumoto, Kiyoshi, Shimoyama, IsaoYear:
2010
Language:
english
DOI:
10.1109/MEMSYS.2010.5442443
File:
PDF, 1.74 MB
english, 2010