Effects of magnetic field on pulse wave forms in plasma immersion ion implantation in a radio-frequency, inductively coupled plasma
Tong, Honghui, Fu, Ricky K. Y., Tang, Deli, Zeng, Xuchu, Chu, Paul K.Volume:
92
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1499983
File:
PDF, 351 KB
english, 2002