[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Improved self-sealing liquid encapsulation in Parylene structures by integrated stackable annular-plate stiction valve
Gutierrez, Christian A., Meng, EllisYear:
2010
Language:
english
DOI:
10.1109/MEMSYS.2010.5442451
File:
PDF, 1.43 MB
english, 2010