[IEEE 2010 IEEE 23rd International Conference on Micro...

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[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Micromachining of Pyrex7740 glass and their applications to wafer-level hermetic packaging of MEMS devices

Liu, Junwen, Huang, Qing-An, Shang, Jintang, Song, Jing, Tang, Jieying
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Year:
2010
Language:
english
DOI:
10.1109/MEMSYS.2010.5442456
File:
PDF, 1.04 MB
english, 2010
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