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[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wafer scale coating of polymer cantilever fabricated by nanoimprint lithography
Greve, Anders, Dohn, Soren, Keller, Stephan, Vig, Asger L., Kristensen, Anders, Nielsen, Claus H., Larsen, Niels B., Boisen, AnjaYear:
2010
Language:
english
DOI:
10.1109/MEMSYS.2010.5442334
File:
PDF, 369 KB
english, 2010