![](/img/cover-not-exists.png)
[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - An implantable all-Parylene liquid-impedance based MEMS force sensor
Gutierrez, Christian A., McCarty, Connor, Kim, Brian, Pahwa, Mrinal, Meng, EllisYear:
2010
Language:
english
DOI:
10.1109/MEMSYS.2010.5442335
File:
PDF, 1.02 MB
english, 2010