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[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Piezoresistive CMOS sensor for the localized measurement of five independent stress components
Lemke, Benjamin, Baskaran, Rajashree, Paul, OliverYear:
2010
Language:
english
DOI:
10.1109/MEMSYS.2010.5442433
File:
PDF, 436 KB
english, 2010