[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Soft-X-ray-charged vertical electrets and its application to electrostatic transducers
Honzumi, Makoto, Ueno, Ai, Hagiwara, Kei, Suzuki, Yuji, Tajima, Toshifumi, Kasagi, NobuhideYear:
2010
Language:
english
DOI:
10.1109/MEMSYS.2010.5442328
File:
PDF, 907 KB
english, 2010