[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Thin-film piezoelectric-on-substrate resonators with Q enhancement and TCF reduction
Pan, Wanling, Ayazi, FarrokhYear:
2010
Language:
english
DOI:
10.1109/MEMSYS.2010.5442303
File:
PDF, 2.65 MB
english, 2010