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[IEEE International Electron Devices Meeting. IEDM Technical Digest - Washington, DC, USA (7-10 Dec. 1997)] International Electron Devices Meeting. IEDM Technical Digest - Physical oxide thickness extraction and verification using quantum mechanical simulation
Bowen, C., Fernando, C.L., Klimeck, G., Chatterjee, A., Blanks, D., Lake, R., Hu, J., Davis, J., Kulkarni, M., Hattangady, S., Chen, I.-C.Year:
1997
Language:
english
DOI:
10.1109/IEDM.1997.650518
File:
PDF, 371 KB
english, 1997