Microstructure, residual stress, and fracture of sputtered TiN films
Zhang, Liqiang, Yang, Huisheng, Pang, Xiaolu, Gao, Kewei, Volinsky, Alex A.Volume:
224
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2013.03.009
Date:
June, 2013
File:
PDF, 860 KB
english, 2013