Advanced chemical model for analysis of Cz and DS...

Journal of Crystal Growth 2014 / 01 Vol. 386

Advanced chemical model for analysis of Cz and DS Si-crystal growth

Vorob’ev, A.N., Sid’ko, A.P., Kalaev, V.V.
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Volume:
386
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2013.10.022
Date:
January, 2014
File:
PDF, 981 KB
english, 2014
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