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MEMS Product Engineering ||
Ortloff, Dirk, Schmidt, Thilo, Hahn, Kai, Bieniek, Tomasz, Janczyk, Grzegorz, Brück, RainerVolume:
10.1007/97
Year:
2014
Language:
english
DOI:
10.1007/978-3-7091-0706-5
File:
PDF, 7.89 MB
english, 2014