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[IEEE 2011 12th International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM 2011) - Erlagol, Altai, Russia (2011.06.30-2011.07.4)] 2011 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices Proceedings - Formation of two-dimensional photonic crystals by electron-beam lithography
Utkin, Dmitry E., Nasimov, Dmitry A.Year:
2011
Language:
english
DOI:
10.1109/EDM.2011.6006911
File:
PDF, 513 KB
english, 2011