Nonlinear laser lithography for indefinitely large-area nanostructuring with femtosecond pulses
Öktem, Bülent, Pavlov, Ihor, Ilday, Serim, Kalaycıoğlu, Hamit, Rybak, Andrey, Yavaş, Seydi, Erdoğan, Mutlu, Ilday, F. ÖmerVolume:
7
Language:
english
Journal:
Nature Photonics
DOI:
10.1038/nphoton.2013.272
Date:
October, 2013
File:
PDF, 6.04 MB
english, 2013