[IEEE 2009 16th IEEE International Symposium on the...

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[IEEE 2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Suzhou, Jiangsu, China (2009.07.6-2009.07.10)] 2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits - Deposition of a-Si:H thin films embedded with nano-crystalline through dilution of argon

Zhi Li,, Wei Li,, Haihong Cai,, Yuguang Gong,, Yadong Jiang,
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Year:
2009
Language:
english
DOI:
10.1109/IPFA.2009.5232581
File:
PDF, 2.15 MB
english, 2009
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