[ASME 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems - Sanya, Hainan, China (January 10–13, 2007)] First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B - Bubble Based Micro/Nano Fabrication Method
Bai, Xiao-Dan, Liu, JingYear:
2007
Language:
english
DOI:
10.1115/MNC2007-21246
File:
PDF, 854 KB
english, 2007