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Radio-frequency capacitively coupled plasmas excited by tailored voltage waveforms: comparison of experiment and particle-in-cell simulations
Delattre, Pierre-Alexandre, Lafleur, Trevor, Johnson, Erik, Booth, Jean-PaulVolume:
46
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/46/23/235201
Date:
June, 2013
File:
PDF, 613 KB
english, 2013