Glow discharge processing in the liquid crystal display industry
Schmitt, Jacques, Elyaakoubi, Mustapha, Sansonnens, LaurentVolume:
11
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/11/3A/331
Date:
August, 2002
File:
PDF, 260 KB
english, 2002