Experimental and numerical study on the optimization of...

Plasma Sources Science and Technology 2013 / 06 Vol. 22; Iss. 3

Experimental and numerical study on the optimization of pulse-modulated radio-frequency discharges

He, Jin, Hu, Jiangtian, Liu, Dawei, Zhang, Yuan-Tao
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
22
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/22/3/035008
Date:
June, 2013
File:
PDF, 815 KB
english, 2013
Conversion to is in progress
Conversion to is failed