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SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Optical Measurement Systems for Industrial Inspection VIII - Comparison of Michelson and Linnik interference microscopes with respect to measurement capabilities and adjustment efforts
Kühnhold, Peter, Lehmann, Peter H., Osten, Wolfgang, Xie, Weichang, Lehmann, Peter, Albertazzi, ArmandoVolume:
8788
Year:
2013
Language:
english
DOI:
10.1117/12.2020250
File:
PDF, 1.13 MB
english, 2013