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[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10, 2007)] ECS Transactions - Innovative Low damage Silicon Nitride Passivation of 100nm In0.45AlAs/In0.4GaAs Metamorphic HEMTs with Remote ICPCVD
Kim, Donghwan, Maeng, Jimin, Kim, Sungwon, Her, Jincherl, Yeon, Seongjin, Kim, Harqkyun, Seo, KwangseokVolume:
6
Year:
2007
Language:
english
DOI:
10.1149/1.2728821
File:
PDF, 806 KB
english, 2007