Capacitive microbeam resonator design
Ahn, Yongchul, Guckel, Henry, Zook, J DavidVolume:
11
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/11/1/311
Date:
January, 2001
File:
PDF, 317 KB
english, 2001