Comparison of methods for the mechanical characterization...

Journal of Micromechanics and Microengineering 2011 / 11 Vol. 21; Iss. 11

Comparison of methods for the mechanical characterization of polymers for MEMS applications

Wouters, Kristof, Gijsenbergh, Pieter, Puers, Robert
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Volume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/11/115027
Date:
November, 2011
File:
PDF, 1.59 MB
english, 2011
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