Cleaning of wafer edge, bevel and back-side with a...

Plasma Sources Science and Technology 2002 / 11 Vol. 11; Iss. 4

Cleaning of wafer edge, bevel and back-side with a torus-shaped capacitively coupled plasma

Jeon, Buil, Chang, Hong-Young, Song, Jong-Kyu, Jeon, Chang-Won
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Volume:
11
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/11/4/319
Date:
November, 2002
File:
PDF, 139 KB
english, 2002
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