SPIE Proceedings [SPIE 2012 International Workshop on Information Data Storage and Ninth International Symposium on Optical Storage - Shanghai, China (Sunday 21 October 2012)] 2012 International Workshop on Information Storage and Ninth International Symposium on Optical Storage - Chemical mechanical planarization of amorphous Ge 2 Sb 2 Te 5 using KClO 4 as oxidizer in acidic slurry
He, Aodong, Song, Zhitang, Bo, Liu, Zhong, Min, Weili, Liu, Wang, Liangyong, Yan, Weixia, Lei, Yu, Wu, Guangping, Gan, Fuxi, Song, ZhitangVolume:
8782
Year:
2013
Language:
english
DOI:
10.1117/12.2015253
File:
PDF, 1.05 MB
english, 2013
File converter
More search results
More benefits 
