SPIE Proceedings [SPIE 2012 International Workshop on Information Data Storage and Ninth International Symposium on Optical Storage - Shanghai, China (Sunday 21 October 2012)] 2012 International Workshop on Information Storage and Ninth International Symposium on Optical Storage - influence of film thickness on optical constants of antimony-based bismuth-doped super-resolution mask layer
Lu, Xinmiao, Wu, Yiqun, Wang, Yang, Wei, Jinsong, Gan, Fuxi, Song, ZhitangVolume:
8782
Year:
2013
Language:
english
DOI:
10.1117/12.2014921
File:
PDF, 1.07 MB
english, 2013