Effect of N2 flow rate on structure and property of...

Journal of Alloys and Compounds 2013 / 5 Vol. 559

Effect of N2 flow rate on structure and property of ZrNbAlNx multilayer films deposited by magnetron sputtering

Shi, Yongjing, Pan, Fusheng, Bao, Mingdong, Yang, Zhili, Wang, Lian
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
559
Language:
english
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2013.01.074
Date:
May, 2013
File:
PDF, 1.89 MB
english, 2013
Conversion to is in progress
Conversion to is failed