Carbon nanotube based via interconnects: Performance...

Microelectronic Engineering 2014 / 05 Vol. 120

Carbon nanotube based via interconnects: Performance estimation based on the resistance of individual carbon nanotubes

Fiedler, Holger, Toader, Marius, Hermann, Sascha, Rodriguez, Raul D., Sheremet, Evgeniya, Rennau, Michael, Schulze, Steffen, Waechtler, Thomas, Hietschold, Michael, Zahn, Dietrich R.T., Schulz, Stefan
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Volume:
120
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.07.007
Date:
May, 2014
File:
PDF, 2.38 MB
english, 2014
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